Noninvasive method to measure the electron temperature in radio frequency capacitively coupled plasmas

Journal:
Applied Physics Letters
Published:
DOI:
10.1063/5.0049186
Affiliations:
2
Authors:
4
Institutions Authors Share
Hanyang University (HYU), South Korea
2.500000
0.63
Korea Research Institute of Standards and Science (KRISS), South Korea
1.500000
0.38