Effects of adatom mobility and Ehrlich–Schwoebel barrier on heteroepitaxial growth of scandium nitride (ScN) thin films

Journal: Applied Physics Letters

Published: 2020-11-23

DOI: 10.1063/5.0027091

Affiliations: 4

Authors: 7

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Institutions Share
Chemistry and Physics of Materials Unit (CPMU), JNCASR, India 0.57
The University of Sydney (USYD), Australia 0.43

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