Excitation of high-frequency in-plane bulk acoustic resonance modes in geometrically engineered hafnium zirconium oxide nano-electro-mechanical membrane

Journal: Applied Physics Letters

Published: 2020-08-13

DOI: 10.1063/5.0016347

Affiliations: 1

Authors: 3

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Department of Electrical and Computer Engineering (ECE), UF, United States of America (USA) 1

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