On-wafer fabrication of etched-mirror UV-C laser diodes with the ALD-deposited DBR

Journal: Applied Physics Letters

Published: 2020-03-25

DOI: 10.1063/1.5145017

Affiliations: 5

Authors: 8

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Institutions Share
Nagoya University, Japan 0.88
Asahi Kasei Corporation, Japan 0.06
Crystal IS, Inc., United States of America (USA) 0.06

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