A versatile and compact high-intensity electron beam for multi-kGy irradiation in nano- or micro-electronic devices

Journal: Applied Physics Letters

Published: 2020-01-27

DOI: 10.1063/1.5141476

Affiliations: 3

Authors: 6

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Institutions Share
Centre of Nuclear Studies of Bordeaux-Gradignan (CENBG), France 0.50
CEA Center for Scientific and Technical Study of Aquitaine (CESTA), France 0.33
CEA DAM Ile-de-France (DIF), France 0.17