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Reduced annealing temperature for ferroelectric HZO on InAs with enhanced polarization

Journal: Applied Physics Letters

Published: 2020-02-14

DOI: 10.1063/1.5141403

Affiliations: 2

Authors: 7

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Institutions Share
Department of Electrical and Information Technology (EIT), LU, Sweden 0.86
NanoLund, LU, Sweden 0.14

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