Time-resolved Langmuir probe diagnostics of a bipolar high power impulse magnetron sputtering discharge
Journal: Applied Physics Letters
Published: 2020-02-10
DOI: 10.1063/1.5140650
Affiliations: 2
Go to articleInstitutions | Share |
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Institute of Physics (FZU), CAS, Czech Republic | 0.83 |
Institute of Physics, University of Greifswald, Germany | 0.17 |