Time-resolved Langmuir probe diagnostics of a bipolar high power impulse magnetron sputtering discharge

Journal: Applied Physics Letters

Published: 2020-02-10

DOI: 10.1063/1.5140650

Affiliations: 2

Authors: 3

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Institutions Share
Institute of Physics (FZU), CAS, Czech Republic 0.83
Institute of Physics, University of Greifswald, Germany 0.17

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