Enhanced electromechanical coupling in SAW resonators based on sputtered non-polar Al0.77Sc0.23N (112⎯0) thin films

Journal: Applied Physics Letters

Published: 2020-03-12

DOI: 10.1063/1.5129329

Affiliations: 3

Authors: 12

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Institutions Share
Fraunhofer Institute for Applied Solid State Physics (IAF), Germany 0.71
Department of Sustainable Systems Engineering (INATECH), Uni Freiburg, Germany 0.21
Qualcomm Germany RFFE GmbH, Germany 0.08

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