Zero temperature coefficient of sound velocity in vitreous silicon oxynitride thin films

Journal: Applied Physics Letters

Published: 2019-06-25

DOI: 10.1063/1.5098354

Affiliations: 4

Authors: 7

Go to article
Institutions Share
Graduate School of Engineering, Osaka University, Japan 0.29
Skyworks Solutions, Inc., Japan 0.29
Department of Physical Sciences, Ritsumeikan University, Japan 0.29
Graduate School / School of Engineering Science, Osaka University, Japan 0.14