Controlled generation of intrinsic near-infrared color centers in 4H-SiC via proton irradiation and annealing

Journal: Applied Physics Letters

Published: 2018-09-18

DOI: 10.1063/1.5045859

Affiliations: 3

Authors: 5

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Institutions FC
Chair of Applied Physics, FAU, Germany 0.80
Institute of Optics, Information and Photonics, FAU, Germany 0.10
Max Planck Institute for the Science of Light (MPL), Germany 0.10

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