Enhanced performance of 17.7 GHz SAW devices based on AlN/diamond/Si layered structure with embedded nanotransducer

Journal: Applied Physics Letters

Published: 2017-12-19

DOI: 10.1063/1.5006884

Affiliations: 7

Authors: 9

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Institutions FC
College of Computer, NUDT, China 0.28
National Laboratory for Parallel and Distributed Processing, NUDT, China 0.28
College of Mechatronic Engineering and Automation, NUDT, China 0.22
Institute of Marine Science and Engineering, NUDT, China 0.11
Institute of Semiconductors (IOS), CAS, China 0.04
School of Electronic, Electrical and Communication Engineering (EECE), UCAS, China 0.04
State Key Laboratory of Transducer Technology, China 0.04