Surface recombination velocity imaging of wet-cleaned silicon wafers using quantitative heterodyne lock-in carrierography

Journal: Applied Physics Letters

Published: 2018-01-04

DOI: 10.1063/1.5003260

Affiliations: 4

Authors: 4

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Institutions FC
Center for Advanced Diffusion-Wave and Photoacoustic Technologies (CADIPT), U of T, Canada 0.46
Advanced Processing Equipment Technology (APET) Co., Ltd., South Korea 0.25
School of Optoelectronic Information, UESTC, China 0.21
Diffusion-Wave Diagnostic Technologies, Canada 0.08