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Suspended-Template Electric-Assisted Nanoimprinting for Hierarchical Micro-Nanostructures on a Fragile Substrate

Journal: ACS Nano

Published: 2019-08-26

DOI: 10.1021/acsnano.9b04031

Affiliations: 2

Authors: 5

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Institutions Share
Micro- and Nano-technology Research Center, XJTU, China 0.50
State Key Laboratory for Manufacturing System Engineering (SKLMS), XJTU, China 0.50