Field-Effect Device Using Quasi-Two-Dimensional Electron Gas in Mass-Producible Atomic-Layer-Deposited Al₂O₃/TᵢO₂ Ultrathin (<10 nm) Film Heterostructures

Journal: ACS Nano

Published: 2018-09-11

DOI: 10.1021/acsnano.8b05891

Affiliations: 6

Authors: 10

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Institutions FC
Department of Materials Science and Chemical Engineering, HYU, South Korea 0.25
Department of Energy Systems Research, AJOU, South Korea 0.20
Department of Physics, AJOU, South Korea 0.20
Division of Materials Science and Engineering, HYU, South Korea 0.15
Center for Electron Microscopy Research, KBSI, South Korea 0.10
Department of Physics, CBNU, South Korea 0.10