Micromachined Chip Scale Thermal Sensor for Thermal Imaging

Journal: ACS Nano

Published: 2018-02-27

DOI: 10.1021/acsnano.7b08504

Affiliations: 4

Authors: 11

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Institutions FC
Department of Materials Science and Engineering, NU, United States of America (USA) 0.27
Northwestern University's Atomic and Nanoscale Characterization Experimental Center (NUANCE), United States of America (USA) 0.27
Applied NanoStructures, Inc. (AppNano), United States of America (USA) 0.27
Department of Mechanical and Manufacturing Engineering, U of C, Canada 0.18

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