Thermal Imaging of Block Copolymers with Sub-10 nm Resolution

Journal:
ACS Nano
Published:
DOI:
10.1021/acsnano.1c01820
Affiliations:
4
Authors:
11
Institutions Authors Share
Microelectronic National Center (CNM), CSIC, Spain
5.000000
0.45
IBM Research - Zurich, Switzerland
3.000000
0.27
University of Göttingen, Germany
2.000000
0.18
SwissLitho AG, Switzerland
1.000000
0.09