Nanometer-Scale Heterogeneous Interfacial Sapphire Wafer Bonding for Enabling Plasmonic-Enhanced Nanofluidic Mid-Infrared Spectroscopy

Journal: ACS Nano

Published: 2020-08-19

DOI: 10.1021/acsnano.0c05794

Affiliations: 4

Authors: 7

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Institutions Share
State Key Laboratory of Advanced Welding and Joining, HIT, China 0.36
NUS Department of Electrical and Computer Engineering (ECE), Singapore 0.33
NUS Center for Intelligent Sensor and MEMS (CISM), Singapore 0.26
NUS Graduate School for Integrative Sciences and Engineering (NGS), Singapore 0.05