Localized and Programmable Chemical Vapor Deposition Using an Electrically Charged and Guided Molecular Flux

Journal: ACS Nano

Published: 2020-09-23

DOI: 10.1021/acsnano.0c03726

Affiliations: 4

Authors: 9

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Institutions Share
Department of Electrical Engineering and Information Technology, TU Ilmenau, Germany 0.50
Fachgebiet Nanotechnologie, TU Ilmenau, Germany 0.39
Institute of Micro- and Nanotechnologies (IMN MacroNano), TU Ilmenau, Germany 0.11