Unprecedented Uniform 3D Growth Integration of 10-Layer Stacked Si Nanowires on Tightly Confined Sidewall Grooves

Journal: Nano Letters

Published: 2020-09-24

DOI: 10.1021/acs.nanolett.0c02950

Affiliations: 2

Authors: 7

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Institutions Share
School of Electronic Science and Engineering, NJU, China 0.50
National Laboratory of Solid State Microstructures (NLSSM), NJU, China 0.50