An N-Heterocyclic Carbene Based Silver Precursor for Plasma-Enhanced Spatial Atomic Layer Deposition of Silver Thin Films at Atmospheric Pressure

Journal: Angewandte Chemie International Edition

Published: 2018-12-03

DOI: 10.1002/anie.201808586

Affiliations: 3

Authors: 8

Go to article
Institutions FC
Chair of Inorganic Chemistry II, RUB, Germany 0.50
Institute of Electronic Devices (LFEB), University of Wuppertal, Germany 0.38
RUBION, RUB, Germany 0.13