Wafer‐Scale High‐Quality Microtubular Devices Fabricated via Dry‐Etching for Optical and Microelectronic Applications

Journal: Advanced Materials

Published: 2020-07-19

DOI: 10.1002/adma.202003252

Affiliations: 3

Authors: 6

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Institutions Share
Institute for Integrative Nanosciences (IIN), IFW Dresden, Germany 0.81
Chemnitz University of Technology (TU Chemnitz), Germany 0.14
Dresden University of Technology (TU Dresden), Germany 0.06